Fluorine grease for high vacuum
FLOIL TKU series
Fluorine grease for semiconductor manufacturing equipment
FLOIL TKU series is an environmentally friendly fluorine grease. This high-spec grease is ideal for various sealing parts such as semiconductor manufacturing equipment, vacuum equipment, vacuum pumps, bearing sliding parts, oil seals, etc., due to its extremely low evaporation rate and viscosity change under high vacuum environment or temperature variance.
‟FLOIL TKU series”Characteristic
Better performance compared to conventional fluorine grease
・REACH Annex XVII Compatible
・Low vapor pressure and extremely low oil evaporation even under high vacuum
・Excellent oxidation stability and chemical resistance
・Does not adversely affect rubber and plastic
・Supports two types of packaging, 1kg container and 50g tube
Product matrix by applications
- Issues
- Product number
- Applications
- For use in low temperature environment of -40 ℃ or lower
- Product number : TKU-056
- Applications : Various sliding parts in semiconductor manufacturing equipment
- To suppress the evaporation of oil when used in a high vacuum environment.
- Product number : TKU-002
- Applications : Various sliding parts in semiconductor manufacturing equipment
We will listen to your needs and conditions of use and propose the most suitable product.
For enquiries regarding our products, purchases, and SDS, kindly contact us at the following.